Granted Patent
Utility
US 6,008,060 · App. 09/060,496
Detecting registration marks with a low energy electron beam
Inventors:
Tai-Hon Philip Chang, Hoseob Kim
Patented Case
View Patent ↗
Granted: Dec 28, 1999
Filed: Apr 15, 1998
Inventors
Tai-Hon Philip Chang
Hoseob Kim
Assignee (at issue)
ETEC SYSTEMS, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.