Granted Patent
Utility
US 6,009,255 · App. 08/915,144
Method of deposition profile simulation
Inventor:
Tsutomu Shinzawa
Patented Case
View Patent ↗
Granted: Dec 28, 1999
Filed: Aug 20, 1997
Inventor
Tsutomu Shinzawa
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.