Granted Patent
Utility
US 6,010,744 · App. 08/996,574
Method for nucleation controlled chemical vapor deposition of metal oxide ferroelectric thin films
Inventors:
Peter Buskirk, Jeff Roeder, Frank Hintermaier, Bryan C. Hendrix, Thomas H. Baum
Patented Case
View Patent ↗
Granted: Jan 4, 2000
Filed: Dec 23, 1997
Inventors
Peter Buskirk
Jeff Roeder
Frank Hintermaier
Bryan C. Hendrix
Thomas H. Baum
Assignees (at issue)
ADVANCED TECHNOLOGY & MATERIALS CO., LTD.
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.