Granted Patent
Utility
US 6,010,939 · App. 09/052,865
Methods for making shallow trench capacitive structures
Inventor:
Subhas Bothra
Patented Case
View Patent ↗
Granted: Jan 4, 2000
Filed: Mar 31, 1998
Inventor
Subhas Bothra
Assignee (at issue)
VLSI Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.