Granted Patent
Utility
US 6,010,963 · App. 08/567,504
Global planarization using SOG and CMP
Inventors:
Derryl D. J. Allman, Kenneth P. Fuchs
Patented Case
View Patent ↗
Granted: Jan 4, 2000
Filed: Dec 5, 1995
Inventors
Derryl D. J. Allman
Kenneth P. Fuchs
Assignee (at issue)
Hyundai Electronics America
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.