Granted Patent
Utility
US 6,011,269 · App. 09/058,258
Shaped shadow projection for an electron beam column
Inventors:
Lee H. Veneklasen, Tai-Hon Philip Chang, Marian Mankos
Patented Case
View Patent ↗
Granted: Jan 4, 2000
Filed: Apr 10, 1998
Inventors
Lee H. Veneklasen
Tai-Hon Philip Chang
Marian Mankos
Assignee (at issue)
ETEC SYSTEMS, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.