Granted Patent
Utility
US 6,012,192 · App. 09/059,897
Substrate processing apparatus
Inventors:
Atsushi Sawada, Yasuhiko Okuda, Shouji Komatsubara
Patented Case
View Patent ↗
Granted: Jan 11, 2000
Filed: Apr 14, 1998
Inventors
Atsushi Sawada
Yasuhiko Okuda
Shouji Komatsubara
Assignee (at issue)
DAINIPPON SCREEN MFG. CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.