Granted Patent
Utility
US 6,014,397 · App. 09/089,330
Laser chamber incorporating ceramic insulators coated with dielectric material
Inventors:
Toshihiko Ishihara, Richard G. Morton
Patented Case
View Patent ↗
Granted: Jan 11, 2000
Filed: Jun 2, 1998
Inventors
Toshihiko Ishihara
Richard G. Morton
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.