Granted Patent
Utility
US 6,014,398 · App. 09/082,139
Narrow band excimer laser with gas additive
Inventors:
Thomas Hofmann, Toshihiko Ishihara, Palash P. Das, Alexander I. Ershov
Patented Case
View Patent ↗
Granted: Jan 11, 2000
Filed: May 20, 1998
Inventors
Thomas Hofmann
Toshihiko Ishihara
Palash P. Das
Alexander I. Ershov
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.