Granted Patent
Utility
US 6,015,499 · App. 09/062,386
Membrane-like filter element for chemical mechanical polishing slurries
Inventor:
Daniel B. Hayden
Patented Case
View Patent ↗
Granted: Jan 18, 2000
Filed: Apr 17, 1998
Inventor
Daniel B. Hayden
Assignee (at issue)
Parker-Hannifin Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.