Granted Patent
Utility
US 6,015,975 · App. 08/956,437
Method and apparatus for charged particle beam exposure
Inventors:
Kenichi Kawakami, Masahiko Susa, Kobayashi Katsuhiko, Akio Yamada, Koichi Yamashita, Naoki Nishio
Patented Case
View Patent ↗
Granted: Jan 18, 2000
Filed: Oct 23, 1997
Inventors
Kenichi Kawakami
Masahiko Susa
Kobayashi Katsuhiko
Akio Yamada
Koichi Yamashita
Naoki Nishio
Assignee (at issue)
Fujitsu Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.