Granted Patent
Utility
US 6,016,325 · App. 09/069,019
Magnetic modulator voltage and temperature timing compensation circuit
Inventors:
Richard M. Ness, William N. Partlo, Richard L. Sandstrom
Patented Case
View Patent ↗
Granted: Jan 18, 2000
Filed: Apr 27, 1998
Inventors
Richard M. Ness
William N. Partlo
Richard L. Sandstrom
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.