IP Library Granted Patent US 6,018,566
Granted Patent Utility
US 6,018,566 · App. 08/957,541

Grid formed with silicon substrate

Inventors: Carol D. Eberhard, George G. Pinneo, Moshe Sergant
Patented Case View Patent ↗
Granted: Jan 25, 2000 Filed: Oct 24, 1997
Inventors
Carol D. Eberhard
George G. Pinneo
Moshe Sergant
Assignee (at issue)
TRW Limited

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Quick Facts
Patent No.
US 6,018,566
App. No.
08/957,541
Filed
1997-10-24
Granted
2000-01-25
Kind
A