Granted Patent
Utility
US 6,019,166 · App. 09/000,981
Pickup chuck with an integral heatsink
Inventors:
Ram Viswanath, Philip Martin
Patented Case
View Patent ↗
Granted: Feb 1, 2000
Filed: Dec 30, 1997
Inventors
Ram Viswanath
Philip Martin
Assignee (at issue)
Intel Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.