Granted Patent
Utility
US 6,020,091 · App. 08/940,891
Hard etch mask
Inventor:
Gill Yong Lee
Patented Case
View Patent ↗
Granted: Feb 1, 2000
Filed: Sep 30, 1997
Inventor
Gill Yong Lee
Assignee (at issue)
Siemens Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.