IP Library Granted Patent US 6,020,175
Granted Patent Utility
US 6,020,175 · App. 08/926,493

Multiple layered functional thin films

Inventors: Mitsuhiko Onda, Yuri Lvov, Katsuhiko Ariga, Toyoki Kunitake
Patented Case View Patent ↗
Granted: Feb 1, 2000 Filed: Sep 10, 1997
Inventors
Mitsuhiko Onda
Yuri Lvov
Katsuhiko Ariga
Toyoki Kunitake
Assignee (at issue)
Japan Science and Technology

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Quick Facts
Patent No.
US 6,020,175
App. No.
08/926,493
Filed
1997-09-10
Granted
2000-02-01
Kind
A