Granted Patent
Utility
US 6,020,261 · App. 09/323,256
Process for forming high aspect ratio circuit features
Inventor:
Douglas H. Weisman
Patented Case
View Patent ↗
Granted: Feb 1, 2000
Filed: Jun 1, 1999
Inventor
Douglas H. Weisman
Assignee (at issue)
Motorola, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.