Granted Patent
Utility
US 6,020,639 · App. 09/223,927
Semiconductor wafer with removed CVD copper
Inventors:
Bruce D. Ulrich, Tue Nguyen, Masato Kobayashi
Patented Case
View Patent ↗
Granted: Feb 1, 2000
Filed: Dec 31, 1998
Inventors
Bruce D. Ulrich
Tue Nguyen
Masato Kobayashi
Assignees (at issue)
Sharp Laboratories of America, Inc.
SHARP KABUSHIKI KAISHA
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.