Granted Patent
Utility
US 6,021,152 · App. 09/110,541
Reflective surface for CVD reactor walls
Inventors:
Aage Olsen, Michael Halpin
Patented Case
View Patent ↗
Granted: Feb 1, 2000
Filed: Jul 6, 1998
Inventors
Aage Olsen
Michael Halpin
Assignee (at issue)
ASM America, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.