Granted Patent
Utility
US 6,021,790 · App. 08/760,643
Substrate treating apparatus and method for treating substrate
Inventors:
Mitsuaki Yoshitani, Eiichi Wada, Makoto Mori, Iwao Tanaka, Yoshihiko Matsushita
Patented Case
View Patent ↗
Granted: Feb 8, 2000
Filed: Dec 4, 1996
Inventors
Mitsuaki Yoshitani
Eiichi Wada
Makoto Mori
Iwao Tanaka
Yoshihiko Matsushita
Assignee (at issue)
DAINIPPON SCREEN MFG. CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.