Granted Patent
Utility
US 6,021,791 · App. 09/106,066
Method and apparatus for immersion cleaning of semiconductor devices
Inventors:
Paul William Dryer, Richard Scott Tirendi, James Bradley Sundin
Patented Case
View Patent ↗
Granted: Feb 8, 2000
Filed: Jun 29, 1998
Inventors
Paul William Dryer
Richard Scott Tirendi
James Bradley Sundin
Assignee (at issue)
SpeedFam-IPEC Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.