IP Library Granted Patent US 6,022,756
Granted Patent Utility
US 6,022,756 · App. 09/127,291

Metal diaphragm sensor with polysilicon sensing elements and methods therefor

Inventors: Douglas Ray Sparks, Andres Viduya, Lewis Henry Little, Marion Edmond Ellis
Patented Case View Patent ↗
Granted: Feb 8, 2000 Filed: Jul 31, 1998
Inventors
Douglas Ray Sparks
Andres Viduya
Lewis Henry Little
Marion Edmond Ellis
Assignee (at issue)
DELCO ELECTRONICS CORPORATION

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Quick Facts
Patent No.
US 6,022,756
App. No.
09/127,291
Filed
1998-07-31
Granted
2000-02-08
Kind
A