Granted Patent
Utility
US 6,022,796 · App. 09/120,190
Geometrical control of device corner threshold
Inventors:
Wayne S. Berry, Juergen Faul, Wilfried E. Haensch, Rick L. Mohler
Patented Case
View Patent ↗
Granted: Feb 8, 2000
Filed: Jul 22, 1998
Inventors
Wayne S. Berry
Juergen Faul
Wilfried E. Haensch
Rick L. Mohler
Assignees (at issue)
International Business Machines Corporation
Siemens Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.