Granted Patent
Utility
US 6,027,839 · App. 09/192,940
Method for transferring pattern images through mix-and-match exposure at improved overlay accuracy
Inventor:
Takeo Hashimoto
Patented Case
View Patent ↗
Granted: Feb 22, 2000
Filed: Nov 16, 1998
Inventor
Takeo Hashimoto
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.