IP Library › Granted Patent US 6,027,951
Granted Patent Utility
US 6,027,951 · App. 09/135,176

Method of making high aspect ratio probes with self-aligned control electrodes

Inventors: Noel C. MacDonald, Z. Lisa Zhang
Patented Case View Patent ↗
Granted: Feb 22, 2000 Filed: Aug 18, 1998
Inventors
Noel C. MacDonald
Z. Lisa Zhang

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Quick Facts
Patent No.
US 6,027,951
App. No.
09/135,176
Filed
1998-08-18
Granted
2000-02-22
Kind
A