Granted Patent
Utility
US 6,028,301 · App. 08/968,250
Method for controlling a micro electro-mechanical systems and verifying the state thereof using light
Inventors:
Kwang Joon Kim, Jong Hyun Lee
Patented Case
View Patent ↗
Granted: Feb 22, 2000
Filed: Nov 12, 1997
Inventors
Kwang Joon Kim
Jong Hyun Lee
Assignee (at issue)
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.