Granted Patent
Utility
US 6,028,435 · App. 08/821,518
Semiconductor device evaluation system using optical fiber
Inventor:
Kiyoshi Nikawa
Patented Case
View Patent ↗
Granted: Feb 22, 2000
Filed: Mar 21, 1997
Inventor
Kiyoshi Nikawa
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.