Granted Patent
Utility
US 6,028,872 · App. 09/211,825
High pulse rate pulse power system with resonant power supply
Inventors:
William N. Partlo, Daniel L. Birx, Richard M. Ness, Daniel A. Rothweil, Paul C. Melcher, Brett D. Smith
Patented Case
View Patent ↗
Granted: Feb 22, 2000
Filed: Dec 15, 1998
Inventors
William N. Partlo
Daniel L. Birx
Richard M. Ness
Daniel A. Rothweil
Paul C. Melcher
Brett D. Smith
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.