Granted Patent
Utility
US 6,028,879 · App. 09/204,111
Narrow band laser with etalon based output coupler
Inventor:
Alexander I. Ershov
Patented Case
View Patent ↗
Granted: Feb 22, 2000
Filed: Dec 2, 1998
Inventor
Alexander I. Ershov
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.