Granted Patent
Utility
US 6,028,880 · App. 09/109,596
Automatic fluorine control system
Inventors:
Jason R. Carlesi, Shahryar Rokni, Mengxiong Gong, Tom A. Watson, Palash P. Das, Michael C. Binder, Muljadi Tantra, David J. Tammadge, Daniel G. Patterson
Patented Case
View Patent ↗
Granted: Feb 22, 2000
Filed: Jul 2, 1998
Inventors
Jason R. Carlesi
Shahryar Rokni
Mengxiong Gong
Tom A. Watson
Palash P. Das
Michael C. Binder
Muljadi Tantra
David J. Tammadge
Daniel G. Patterson
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.