Granted Patent
Utility
US 6,030,894 · App. 09/119,541
Method for manufacturing a semiconductor device having contact plug made of Si/SiGe/Si
Inventors:
Hiromitsu Hada, Toru Tatsumi, Naoki Kasai, Hidemitsu Mori
Patented Case
View Patent ↗
Granted: Feb 29, 2000
Filed: Jul 20, 1998
Inventors
Hiromitsu Hada
Toru Tatsumi
Naoki Kasai
Hidemitsu Mori
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.