Granted Patent
Utility
US 6,033,293 · App. 08/947,178
Apparatus for performing chemical-mechanical polishing
Inventors:
Annette M. Crevasse, Alvaro Maury, Sanjay Patel, John Thomas Sowell
Patented Case
View Patent ↗
Granted: Mar 7, 2000
Filed: Oct 8, 1997
Inventors
Annette M. Crevasse
Alvaro Maury
Sanjay Patel
John Thomas Sowell
Assignee (at issue)
LUCENT TECHNOLOGIES INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.