IP Library › Granted Patent US 6,033,521
Granted Patent Utility
US 6,033,521 · App. 08/869,112

Tilt mechanism for wafer cassette

Inventors: Robert F. Allen, Ricardo T. Jordan
Patented Case View Patent ↗
Granted: Mar 7, 2000 Filed: Jun 4, 1997
Inventors
Robert F. Allen
Ricardo T. Jordan
Assignee (at issue)
SpeedFam-IPEC Corporation

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Quick Facts
Patent No.
US 6,033,521
App. No.
08/869,112
Filed
1997-06-04
Granted
2000-03-07
Kind
A