IP Library › Granted Patent US 6,033,583
Granted Patent Utility
US 6,033,583 · App. 08/851,258

Vapor etching of nuclear tracks in dielectric materials

Inventors: Ronald G. Musket, John D. Porter, James M. Yoshiyama, Robert J. Contolini
Patented Case View Patent ↗
Granted: Mar 7, 2000 Filed: May 5, 1997
Inventors
Ronald G. Musket
John D. Porter
James M. Yoshiyama
Robert J. Contolini
Assignee (at issue)
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA

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Quick Facts
Patent No.
US 6,033,583
App. No.
08/851,258
Filed
1997-05-05
Granted
2000-03-07
Kind
A