Granted Patent
Utility
US 6,033,596 · App. 08/800,562
Multi-oxidizer slurry for chemical mechanical polishing
Inventors:
Vlasta Brusic Kaufman, Shumin Wang
Patented Case
View Patent ↗
Granted: Mar 7, 2000
Filed: Feb 18, 1997
Inventors
Vlasta Brusic Kaufman
Shumin Wang
Assignee (at issue)
Cabot Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.