Granted Patent
Utility
US 6,033,993 · App. 08/936,035
Process for removing residues from a semiconductor substrate
Inventors:
M. Lee Love, Jr., Kenji Honda
Patented Case
View Patent ↗
Granted: Mar 7, 2000
Filed: Sep 23, 1997
Inventors
M. Lee Love, Jr.
Kenji Honda
Assignee (at issue)
Olin Microelectronic Chemicals, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.