IP Library › Granted Patent US 6,034,348
Granted Patent Utility
US 6,034,348 · App. 08/932,546

Micro etching system using laser ablation

Inventors: Je Ha Kim, Seok Kil Han, Kwang Yong Kang
Patented Case View Patent ↗
Granted: Mar 7, 2000 Filed: Sep 17, 1997
Inventors
Je Ha Kim
Seok Kil Han
Kwang Yong Kang
Assignee (at issue)
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE

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Quick Facts
Patent No.
US 6,034,348
App. No.
08/932,546
Filed
1997-09-17
Granted
2000-03-07
Kind
A