Granted Patent
Utility
US 6,034,375 · App. 09/046,037
Method of aligning a semiconductor substrate with a base stage and apparatus for doing the same
Inventor:
Hiroshi Nozue
Patented Case
View Patent ↗
Granted: Mar 7, 2000
Filed: Mar 23, 1998
Inventor
Hiroshi Nozue
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.