Granted Patent
Utility
US 6,034,984 · App. 09/310,786
Tangential fan with cutoff assembly and vibration control for electric discharge laser
Inventors:
Thomas Hofmann, James K. Howey, Robert A. Shannon, Richard C. Ujazdowski, Tom A. Watson, R. Kyle Webb
Patented Case
View Patent ↗
Granted: Mar 7, 2000
Filed: May 12, 1999
Inventors
Thomas Hofmann
James K. Howey
Robert A. Shannon
Richard C. Ujazdowski
Tom A. Watson
R. Kyle Webb
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.