Granted Patent
Utility
US 6,036,581 · App. 09/084,013
Substrate cleaning method and apparatus
Inventor:
Hidemitsu Aoki
Patented Case
View Patent ↗
Granted: Mar 14, 2000
Filed: May 26, 1998
Inventor
Hidemitsu Aoki
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.