Granted Patent
Utility
US 6,036,784 · App. 09/025,251
Apparatus for holding substrates
Inventors:
Gwo-Jou Huang, Jong-Yen Lin, Chieh-Ling Hsiao
Patented Case
View Patent ↗
Granted: Mar 14, 2000
Filed: Feb 18, 1998
Inventors
Gwo-Jou Huang
Jong-Yen Lin
Chieh-Ling Hsiao
Assignee (at issue)
Industrial Technology Research Institute
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.