Granted Patent
Utility
US 6,037,016 · App. 09/077,513
Capacitively coupled RF diamond-like-carbon reactor
Inventors:
David J. Devlin, Don M. Coates, Thomas Arthur Archuleta, Robert S. Barbero
Patented Case
View Patent ↗
Granted: Mar 14, 2000
Filed: May 29, 1998
Inventors
David J. Devlin
Don M. Coates
Thomas Arthur Archuleta
Robert S. Barbero
Assignees (at issue)
E.I. DU PONT DE NEMOURS AND COMPANY
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.