Granted Patent
Utility
US 6,037,671 · App. 09/184,861
Stepper alignment mark structure for maintaining alignment integrity
Inventors:
Nick Kepler, Olov Karlsson, Larry Wang, Basab Bandyopadhyay, Effiong Ibok, Christopher F. Lyons
Patented Case
View Patent ↗
Granted: Mar 14, 2000
Filed: Nov 3, 1998
Inventors
Nick Kepler
Olov Karlsson
Larry Wang
Basab Bandyopadhyay
Effiong Ibok
Christopher F. Lyons
Assignee (at issue)
Advanced Micro Devices, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.