Granted Patent
Utility
US 6,039,059 · App. 08/724,518
Wafer cleaning system
Inventor:
Mario E. Bran
Patented Case
View Patent ↗
Granted: Mar 21, 2000
Filed: Sep 30, 1996
Inventor
Mario E. Bran
Assignee (at issue)
Verteq, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.