Granted Patent
Utility
US 6,040,107 · App. 09/019,958
Photosensitive diazonaphthoquinone esters based on selected cyclic alkyl ether-containing phenolics and their use in radiation sensitive mixtures
Inventors:
Andrew J. Blakeney, Arturo Norberto Medina, Medhat A. Toukhy, Lawrence Ferreira, Alfred T. Jeffries, III, Ahmad A. Naiini
Patented Case
View Patent ↗
Granted: Mar 21, 2000
Filed: Feb 6, 1998
Inventors
Andrew J. Blakeney
Arturo Norberto Medina
Medhat A. Toukhy
Lawrence Ferreira
Alfred T. Jeffries, III
Ahmad A. Naiini
Assignee (at issue)
Olin Microelectronic Chemicals, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.