Granted Patent
Utility
US 6,040,232 · App. 09/236,955
Method of manufacturing shallow trench isolation
Inventor:
Jing-Horng Gau
Patented Case
View Patent ↗
Granted: Mar 21, 2000
Filed: Jan 25, 1999
Inventor
Jing-Horng Gau
Assignee (at issue)
United Semiconductor Corp.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.