Granted Patent
Utility
US 6,040,583 · App. 09/083,095
Electron beam exposure method using a moving stage
Inventor:
Naka Onoda
Patented Case
View Patent ↗
Granted: Mar 21, 2000
Filed: May 22, 1998
Inventor
Naka Onoda
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.