Granted Patent
Utility
US 6,040,706 · App. 08/963,141
Contactor and semiconductor device inspecting method
Inventor:
Katsuhiko Tsuura
Patented Case
View Patent ↗
Granted: Mar 21, 2000
Filed: Nov 3, 1997
Inventor
Katsuhiko Tsuura
Assignee (at issue)
Matsushita Electronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.