Granted Patent
Utility
US 6,041,174 · App. 09/084,912
Method of simulating oxidation enhanced diffusion by solving partial differential equation
Inventor:
Yutaka Akiyama
Patented Case
View Patent ↗
Granted: Mar 21, 2000
Filed: May 28, 1998
Inventor
Yutaka Akiyama
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.