Granted Patent
Utility
US 6,041,817 · App. 09/138,174
Processing system having vacuum manifold isolation
Inventor:
Ronald R. Guertin
Patented Case
View Patent ↗
Granted: Mar 28, 2000
Filed: Aug 21, 1998
Inventor
Ronald R. Guertin
Assignee (at issue)
FAIRCHILD SEMICONDUCTOR CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.